- Vajossuonkatu 8, 20360 Turku, Finland
email, Tel.
Thin film deposition in ultra high vacuum (UHV) environment is our business. We design and manufacture advanced thin film deposition systems for Molecular Beam Epitaxy (MBE), UHV Magnetron Sputtering and Pulsed Laser Deposition.
DCA thin film deposition systems range from a compact UHV PLD system with 10 x 10 mm 2 sample size to multiwafer MBE systems. The systems product range includes:
- Molecular Beam Epitaxy systems for III-V, II-VI, oxide-MBE, HgCdTe, GaN, SiGe, OLED and CIGS solar cell applications
- UHV sputtering systems for sequential or co-deposition
- Pulsed Laser Deposition (PLD) systems for oxides and ceramic materials
- Picosecond Pulsed Laser Deposition (PicoPLD) systems
- Carbon Nanotube deposition systems